Low-Dielectric Constant Materials-Synthesis and Applications in Microelectronics: Symposium Held April 17-19, 1995, San Francisco, California, U.S.A. |
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Page 31
Compatibility with copper as the interconnecting metal has been determined and discussed [ 8 ] . ... the device interconnection network becomes a limiting factor in determining the chip performance such as the speed , area , reliability ...
Compatibility with copper as the interconnecting metal has been determined and discussed [ 8 ] . ... the device interconnection network becomes a limiting factor in determining the chip performance such as the speed , area , reliability ...
Page 135
The anisotropy of dielectric properties were determined experimentally , the vertical ( out - of - plane ) dielectric properties were determined by MIM ( Metal - Insulator - Metal ) measurements , and the horizontal ( in - plane ) ...
The anisotropy of dielectric properties were determined experimentally , the vertical ( out - of - plane ) dielectric properties were determined by MIM ( Metal - Insulator - Metal ) measurements , and the horizontal ( in - plane ) ...
Page 149
The thickness was determined from x - ray reflectivity measurements during sample heating at a rate -10 ° C / hour . > a It is noteworthy that the bulk radius of gyration of this polymer ( 233,000 Mw ) is 135 Å , and the thickness of a ...
The thickness was determined from x - ray reflectivity measurements during sample heating at a rate -10 ° C / hour . > a It is noteworthy that the bulk radius of gyration of this polymer ( 233,000 Mw ) is 135 Å , and the thickness of a ...
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Contents
VaMethods | 3 |
Fluorinated Low Thermal Expansion Coefficient Polyimides | 19 |
Investigations of the Low Dielectric Constant Fluorinated | 31 |
Copyright | |
21 other sections not shown
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Common terms and phrases
absorption addition adhesion aerogels alternating annealing applications bond bulk capacitance chemical circuit coating coefficient compared copolyimide copolymer copper cured decrease defects density deposition determined device dielectric properties effect electrical electronic energy etch field Figure film thickness fluorinated frequency function glass higher IEEE imaging improve in-plane increase indicate initial integrated interconnect interlayer dielectric layer light loss low dielectric constant lower materials measurements mechanical metal method microelectronic Microwave modulus moisture monomers observed obtained optical organic oxide Parylene patterns performance permittivity planarization plasma polishing polyimide film polymer polymeric prepared properties range reduce requirements Research resistance resonators sample shown in Figure shows silica silicon SiO2 SOG film solution stress structure studied substrate surface Table technique Technology Teflon temperature thermal thermal stability thickness thin films values vapor various Volume wafer
Bibliographic information
| Title | Low-Dielectric Constant Materials-Synthesis and Applications in Microelectronics: Symposium Held April 17-19, 1995, San Francisco, California, U.S.A. Materials Research Society symposia proceedings, ISSN 0272-9172 Volume 381 of Materials Research Society: Materials Research Society symposia proceedings |
| Editor | Toh-Ming Lu |
| Publisher | Materials Research Society, 1995 |
| Original from | the University of Michigan |
| Digitized | 10 Dec 2007 |
| ISBN | 1558992847, 9781558992849 |
| Length | 288 pages |
| Subjects | › › Technology & Engineering / Electronics / General |
| Export Citation | BiBTeX EndNote RefMan |