Low-dielectric Constant Materials-synthesis and Applications in Microelectronics: Symposium Held April 17-19, 1995, San Francisco, California, U.S.A.Toh-Ming Lu |
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Results 1-2 of 2
Page xiii
... Magnetic Ultrathin Films , Multilayers and Surfaces , A. Fert , H. Fujimori , G. Guntherodt , B. Heinrich , W.F. Egelhoff , Jr. , E.E. Marinero , R.L. White , 1995 , ISBN : 1-55899-287-1 Volume 385 - Polymer / Inorganic Interfaces II ...
... Magnetic Ultrathin Films , Multilayers and Surfaces , A. Fert , H. Fujimori , G. Guntherodt , B. Heinrich , W.F. Egelhoff , Jr. , E.E. Marinero , R.L. White , 1995 , ISBN : 1-55899-287-1 Volume 385 - Polymer / Inorganic Interfaces II ...
Page 250
... magnetic field . We used parallel - plate reactor to investigate the deposition mechanism of the a - C : F films , and helicon reactor to deposit the films with high deposition rate and to prove the potential for the productive use ...
... magnetic field . We used parallel - plate reactor to investigate the deposition mechanism of the a - C : F films , and helicon reactor to deposit the films with high deposition rate and to prove the potential for the productive use ...
Contents
Methods | 3 |
Fluorinated Low Thermal Expansion Coefficient Polyimides | 19 |
Vapor Deposition of Very Low K Polymer Films | 45 |
Copyright | |
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1995 Materials Research absorption annealing applications bond BPDA-PDA bulk c-BN capacitance chemical vapor deposition circuit coating copolymer copper cured decrease density device dielectric film dielectric properties electrode electromigration FAST-SOG films film thickness films deposited fluorinated fluorinated polyimide frequency FTIR glass transition temperature h-BN helicon reactor IEEE Trans in-plane increase insulating integrated integrated circuits interlayer dielectric layer leakage current low dielectric constant lower Materials Research Society measured mechanical properties metal microelectronics Microwave modulus moisture monomers multilevel interconnections optical organic polymers oxide Parylene patterns PECVD permittivity planarization plasma plasma treatment polish rate polyimide polyimide film polymeric materials pore Proc refractive index resin resistance resonators RTCVD-SiOF sample shown in Figure Si-O-Si silica aerogels siloxane SiO2 SiO2 film slurry SOG film solvent spin-coated spin-on stress substrate surface Table technique Technology TEOS/O test structure thermal stability thin films ULSI vapor deposition wet etch