Low-Dielectric Constant Materials-Synthesis and Applications in Microelectronics: Symposium Held April 17-19, 1995, San Francisco, California, U.S.A.

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Toh-Ming Lu
Materials Research Society, 1995 - Technology & Engineering - 288 pages

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Contents

VaMethods
3
Fluorinated Low Thermal Expansion Coefficient Polyimides
19
Investigations of the Low Dielectric Constant Fluorinated
31
Copyright

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