Low-dielectric Constant Materials-synthesis and Applications in Microelectronics: Symposium Held April 17-19, 1995, San Francisco, California, U.S.A.Toh-Ming Lu |
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Page 10
... test structures in order to demonstrate feasibility and to address these process integration issues at the earliest ... structure is being fabricated to demonstrate the compatibility of organic low k dielectric material with standard ...
... test structures in order to demonstrate feasibility and to address these process integration issues at the earliest ... structure is being fabricated to demonstrate the compatibility of organic low k dielectric material with standard ...
Page 136
... Test equipments for intra- line capacitance measurements included a HP4194A ... structure is as shown in Figure 1 . Small VHORG Layout Space 2m 0.8 um 2um ... test structure because the polymeric film was directly exposed to the ...
... Test equipments for intra- line capacitance measurements included a HP4194A ... structure is as shown in Figure 1 . Small VHORG Layout Space 2m 0.8 um 2um ... test structure because the polymeric film was directly exposed to the ...
Page 211
... test structure . FAREAS The test structures were evaluated electrically using Time Domain Reflectometry ( TDR ) . The transmitted waveforms for a ustripline ( four layer ) Al / PA structure are shown in Figure 10 ; stripline ( two layer ) ...
... test structure . FAREAS The test structures were evaluated electrically using Time Domain Reflectometry ( TDR ) . The transmitted waveforms for a ustripline ( four layer ) Al / PA structure are shown in Figure 10 ; stripline ( two layer ) ...
Contents
Methods | 3 |
Low Dielectric Constant Thermosetting Resins | 111 |
Low Thermal Budget Processing of Organic Dielectrics | 117 |
Copyright | |
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1995 Materials Research absorption annealing applications bond BPDA-PDA bulk c-BN capacitance chemical vapor deposition circuit coating copolymer copper cured density device dielectric film dielectric properties electrode electromigration etch rate FAST-SOG films film thickness films deposited fluorinated fluorinated polyimide frequency FTIR g/cm³ glass transition temperature h-BN helicon reactor IEEE Trans in-plane increase insulating integrated integrated circuits interlayer dielectric layer leakage current low dielectric constant lower LPD-SiO2 Materials Research Society measured mechanical properties metal microelectronics Microwave modulus moisture monomers multilevel interconnections optical organic polymers oxide Parylene patterns PECVD permittivity planarization plasma plasma treatment polish rate polyimide polyimide film polymeric materials pore Proc refractive index resin resistance resonators RTCVD-SiOF sample shown in Figure Si-O-Si silica aerogels siloxane SiO2 SiO2 film slurry SOG film spin-coated spin-on stress substrate surface Table technique Technology TEOS/O thermal stability thin films ULSI vapor deposition wet etch