Neutron Scattering for Materials Science: Volume 166S. M. Shapiro, S. C. Moss, J. D. Jorgensen The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. |
From inside the book
Results 1-3 of 13
Page 324
... wafer surface will show the full 1.47 or 1.78 MeV of energy , but particles originating from within the near surface of the wafer will have lost some of their energy in exiting the wafer . Therefore , the count versus the measured ...
... wafer surface will show the full 1.47 or 1.78 MeV of energy , but particles originating from within the near surface of the wafer will have lost some of their energy in exiting the wafer . Therefore , the count versus the measured ...
Page 327
... wafer and figure 3 presents the boron spectrum . Figure 4 shows the presence of two boron peaks on a wafer with polysilicon deposited over thermal oxide at 620 ° C. The first peak is at the silicon dioxide / polysilicon interface and ...
... wafer and figure 3 presents the boron spectrum . Figure 4 shows the presence of two boron peaks on a wafer with polysilicon deposited over thermal oxide at 620 ° C. The first peak is at the silicon dioxide / polysilicon interface and ...
Page 329
... wafer as is the presence of the boron peak at the surface of polysilicon layer 2. As with the NDP measurements , the SIMS spectra of these two wafers suggest that boron arrives at the silicon surface during exposure to air . Conclusions ...
... wafer as is the presence of the boron peak at the surface of polysilicon layer 2. As with the NDP measurements , the SIMS spectra of these two wafers suggest that boron arrives at the silicon surface during exposure to air . Conclusions ...
Contents
THE KINDER GENTLER PROBE OF CONDENSED MATTER | 3 |
NEUTRON SCATTERING METHODS FOR MATERIAL SCIENCE | 15 |
THE ADVANCED NEUTRON SOURCE | 27 |
Copyright | |
64 other sections not shown
Other editions - View all
Common terms and phrases
1990 Materials Research aerogel alloys analysis angle neutron scattering annealing Argonne Argonne National Laboratory atoms beam boron Bragg Bragg peaks calculated composition concentration copolymer correlation Cu-O decrease defects detector determined deuterated deuterium diffractometer diffuse scattering displacements distribution effect elastic electronic energy experimental Fermi surface ferroelastic Figure film function incoherent scattering increase inelastic interactions interface ISBN lattice parameter layers Lett magnetic Materials Research Society Materials Science measured metals method mode molecular multilayers National Laboratory neutron diffraction neutron powder diffraction neutron reflectivity Neutron Source observed obtained oxygen oxygen content particles peak phase transition phonon Phys plane polymer pore powder diffraction Proc range reactor refinement residual stresses resolution sample scattering intensity short-range order shown in Fig shows silica silicon single crystal sintering specimen spectrometer stoichiometry strain structure factor superconductivity surface Symp technique temperature thermal values Volume Vycor wafer wavelength width X-ray YBCO