Thin film processes IIThis sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Key Features * Provides an all-new sequel to the 1978 classic, Thin Film Processes * Introduces new topics, and several key topics presented in the original volume are updated * Emphasizes practical applications of major thin film deposition and etching processes * Helps readers find the appropriate technology for a particular application |
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Page 22
At very low discharge currents, the glow will not cover all regions of the cathode.
This is called the normal discharge. As the discharge is increased, by small
increases in voltage, the coverage of the cathode increases. Eventually, the
entire ...
At very low discharge currents, the glow will not cover all regions of the cathode.
This is called the normal discharge. As the discharge is increased, by small
increases in voltage, the coverage of the cathode increases. Eventually, the
entire ...
Page 59
The device consists of a source region, with typically two large electromagnet
coils just outside the chamber. The microwaves enter the chamber through a port
at the top. The details of the various tuners, the circulators, and the power supply
...
The device consists of a source region, with typically two large electromagnet
coils just outside the chamber. The microwaves enter the chamber through a port
at the top. The details of the various tuners, the circulators, and the power supply
...
Page 575
Schematic representations of the (a) direct and (b) remote PECVD processes for
the deposition of SiO2 thin films. the process are: (1) plasma excitation of a
selected subset of the processes gases in the plasma generation region; (2)
extraction ...
Schematic representations of the (a) direct and (b) remote PECVD processes for
the deposition of SiO2 thin films. the process are: (1) plasma excitation of a
selected subset of the processes gases in the plasma generation region; (2)
extraction ...
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Common terms and phrases
alloy anode Appl applications AsH3 atoms cathode chamber chemical chemical vapor deposition coatings composition compound Crystal Growth density deposition rate device dielectric dopant doping effects Electrochem emission epitaxial etch rate evaporation excitation film deposition flow flux GaAs gas-phase gases glow discharge growth rate heater heating increase ion beam ion bombardment ion energy ion source ionization kinetic laser layer Lett LPCVD magnetic field magnetron material metal molecules nitride OMVPE optical oxide particle PECVD photochemical photodeposition photon photoresist Phys plasma plasma etching potential precursor pressure Proc produce pump ratio reactants reaction reactor refractory metal region remote PECVD RHEED semiconductor shown in Fig SiH4 silane silicon silicon nitride SiO2 sol-gel species sputter deposition sputtering structure substrate substrate temperature susceptor target techniques Technol Technology thermal thickness thin film Thin Solid Films tion torr typically vacuum voltage wafer wavelength
Bibliographic information
| Title | Thin film processes II Volume 2 of Thin Film Processes, Werner Kern |
| Authors | John L. Vossen, Werner Kern |
| Editors | John L. Vossen, Werner Kern |
| Edition | illustrated |
| Publisher | Academic Press, 1991 |
| Original from | the University of Michigan |
| Digitized | 10 Dec 2007 |
| ISBN | 0127282513, 9780127282510 |
| Length | 866 pages |
| Subjects | › › Electronic books Science / Physics Technology & Engineering / Electronics / Semiconductors Technology & Engineering / Material Science Thin film devices Thin films |
| Export Citation | BiBTeX EndNote RefMan |