Principles of Plasma Discharges and Materials Processing

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John Wiley & Sons, Apr 8, 2005 - Science - 730 pages
A Thorough Update of the Industry Classic on Principles of Plasma Processing

The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals.

The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters.

New and expanded topics include:
* Updated cross sections
* Diffusion and diffusion solutions
* Generalized Bohm criteria
* Expanded treatment of dc sheaths
* Langmuir probes in time-varying fields
* Electronegative discharges
* Pulsed power discharges
* Dual frequency discharges
* High-density rf sheaths and ion energy distributions
* Hysteresis and instabilities
* Helicon discharges
* Hollow cathode discharges
* Ionized physical vapor deposition
* Differential substrate charging

With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.
 

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Contents

1 INTRODUCTION
1
2 BASIC PLASMA EQUATIONS AND EQUILIBRIUM
23
3 ATOMIC COLLISIONS
43
4 PLASMA DYNAMICS
87
5 DIFFUSION AND TRANSPORT
133
6 DIRECT CURRENT DC SHEATHS
165
7 CHEMICAL REACTIONS AND EQUILIBRIUM
207
8 MOLECULAR COLLISIONS
235
13 WAVEHEATED DISCHARGES
491
14 DIRECT CURRENT DC DISCHARGES
535
15 ETCHING
571
16 DEPOSITION AND IMPLANTATION
619
17 DUSTY PLASMAS
649
18 KINETIC THEORY OF DISCHARGES
679
APPENDIX A COLLISION DYNAMICS
723
APPENDIX B THE COLLISION INTEGRAL
727

9 CHEMICAL KINETICS AND SURFACE PROCESSES
285
10 PARTICLE AND ENERGY BALANCE IN DISCHARGES
327
11 CAPACITIVE DISCHARGES
387
12 INDUCTIVE DISCHARGES
461
APPENDIX C DIFFUSION SOLUTIONS FOR VARIABLE MOBILITY MODEL
731
REFERENCES
735
INDEX
749
Copyright

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About the author (2005)

MICHAEL A. LIEBERMAN, PhD, is Professor in the Graduate School in Electrical Engineering at the University of California, Berkeley. He has published more than 170 journal articles on the topics of plasmas, plasma processing, and nonlinear dynamics. He has also coauthored, with Professor Lichtenberg, Regular and Stochastic Motion and Regular and Chaotic Dynamics, Second Edition.

ALLAN J. LICHTENBERG, PhD, is Professor in the Graduate School in Electrical Engineering at the University of California, Berkeley. A respected pioneer in the fields of high-temperature plasmas, plasma discharges, and nonlinear dynamics, he has published about 150 articles in these areas. In addition to the books coauthored with Professor Lieberman, he has written an earlier monograph Phase-Space Dynamics of Particles (Wiley).

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