Thin Film Processes, Volume 1John L. Vossen, Werner Kern Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process. |
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Page 40
... production is a very major problem . There are several examples in the literature [ 188–198a ] of laboratory to production scale ups that range from larger bell jars to very large continuous machines . It is almost axi- omatic to state ...
... production is a very major problem . There are several examples in the literature [ 188–198a ] of laboratory to production scale ups that range from larger bell jars to very large continuous machines . It is almost axi- omatic to state ...
Page 357
... produce them in practice economically . The major reason for the acceleration of interest in plasma processing and production - type reactors has been for the use of plasma silicon nitride films as a final device passivation overcoat ...
... produce them in practice economically . The major reason for the acceleration of interest in plasma processing and production - type reactors has been for the use of plasma silicon nitride films as a final device passivation overcoat ...
Page 560
... production of atoms in , 501-503 production of ions in , 501-503 production of radicals in , 501-503 rf , 27-29 , 500-501 rf coil , confinement , 31 thermionic support , 30 Glow discharge polymerization mechanism of polymer formation ...
... production of atoms in , 501-503 production of ions in , 501-503 production of radicals in , 501-503 rf , 27-29 , 500-501 rf coil , confinement , 31 thermionic support , 30 Glow discharge polymerization mechanism of polymer formation ...
Contents
Glow Discharge Sputter Deposition | 13 |
Equipment Configuration | 31 |
Preconditioning of Targets Substrates and Systems for Film | 41 |
Copyright | |
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Å/min alloys anode Appl applications argon atoms bias bombardment cathode Chem chemical coatings composition compounds current density deposition rate dielectric discharge power effect electric Electrochem electron electroplating energy Epitaxial etch rate etchants etching processes film deposition flow rate GaAs gases glow discharge polymerization H₂ H₂O heating HNO3 increase ion beam deposition ion source ionization layer mA/cm² magnetic field magnetron mask metal mTorr N₂ nitride O₂ operation oxide photoresist Phys planar plasma plasma etching plating PM sputtering polishing polymer polymer deposition potential pressure Proc produce ratio reactants reaction reactive sputtering reactor Section semiconductor shown in Fig silicon silicon nitride SiO2 solution species sputter deposition Sputter Gun sputtering yield starting material stoichiometry substrate susceptor target surface techniques Technol temperature thermal thickness Thin Film Thin Solid Films tion U.S. Patent uniform vacuum vapor voltage wafer York µm/min