Automatic Generation of Compact Models for the Efficient Calculation of MEMS Structures

analysis applied approximation behavior body called chapter complete components computational configuration Consider consistent continuous continuum controllability coordinate coupled defined deformation described differential discretization displacement domain dynamic effects elastic electric electrodynamics electromagnetic electrostatic element method energy equations field Figure finite element first force formulation framework geometry given implementation initial input integral interaction Kalman Lagrange Lagrangian density LCModel linear magnetic material form material frame Mathematica mathematical matrix mechanical MEMS MEMS structure mesh method Mode model order reduction Modeling and Simulation motion node nonlinear observability operator original physical position potential present problem projection proposed referred relation represent shape functions simulation solution space spatial frame step strain submodel techniques tensor term tion transformation u x Vx values variation vector Vx x 21