Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems: Volume 276A. Peter Jardine The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. |
Contents
FERROELECTRIC THIN FILMS FOR MICROELECTROMECHANICAL | 3 |
SMART FERROELECTRIC FILMS AND FIBERS APPLICATIONS | 11 |
PIEZOELECTRIC PROPERTIES OF 03 CERAMICPOLAR POLYMER | 25 |
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35 other sections not shown
Common terms and phrases
1992 Materials Research alloy anisotropy annealing applications beam boron cantilever ceramics chemical coefficient composite compressive debonding deformation devices dielectric diffusion doped electric Electron energy epitaxial etch experimental fabrication ferroelastic ferroelectric fibers Figure film thickness films deposited frequency grain heat IEEE impact integrated interface loading LPCVD martensite Materials Research Society measured mechanical membrane MEMS metal micro microheater micromachined microstructure optical orientation oxide phase phosphosilicate glass Phys piezoelectric polarization poly-Si polycrystalline silicon polyimide polysilicon polysilicon films pressure Proc properties pyroelectric residual stress resistance resonant room temperature rotor RTINI sacrificial layer samples Sensors and Actuators Shape Memory shape memory alloy shown in Fig silicon dioxide silicon nitride single crystal SiO2 SnO2 sol-gel solution sputtering strain structure substrate surface switching Symp techniques tensile texture thermal thin film TiNi transformation valves voltage wafer Young's modulus