Thin film processes

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Machine derived contents note: Table of contents for Thin film processes / edited by John L. Vossen, Werner Kern

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Introduction.<$> J.L. Vossen, <$> Physical Methods of Film Deposition.<$> J.L. Vossen and J.J. Cuomo, <$> Glow Discharge Sputter Deposition. J.A. Thornton and A.S. Penfold, <$> Cylindrical Magnetron Sputtering. D.B. Fraser, <$> The Sputter and S-Gun Magnetrons. R.K. Waits, <$> Planar Magnetron Sputtering. J.M.E. Harper, <$> Ion Beam Deposition. Chemical Methods of Film Deposition.<$> F.A. Lowenheim, <$> Deposition of Inorganic Films from Solution. W. Kern and V.S. Ban, <$> Chemical Vapor Deposition of Inorganic Thin Films. Physical-Chemical Methods of Film Deposition<$> J.R. Hollahan and R.S. Rosler, <$> Plasma Deposition of Inorganic Thin Films. H. Yasuda, <$> Glow Discharge Polymerization. Etching Processes.<$> W. Kern and C.A. Deckert, <$> Chemical Etching. C.M. Melliar-Smith and C.J. Mogab, <$> Plasma-Assisted Etching Techniques for Pattern Delineation. References. Index

Library of Congress subject headings for this publication: Thin films