Soft X-Rays and Extreme Ultraviolet Radiation : Principles and Applications

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Cover; Half-title; Title; Copyright; Dedication; Contents; PREFACE; ACKNOWLEDGMENTS; CHAPTER 1. INTRODUCTION; 1.1 The Soft X-Ray and Extreme Ultraviolet Regions of the Electromagnetic Spectrum; 1.2 Basic Absorption and Emission Processes; 1.3 Atomic Energy Levels and Allowed Transitions; 1.4 Scattering, Diffraction, and Refraction of Electromagnetic Radiation; References; Homework Problems; CHAPTER 2. RADIATION AND SCATTERING AT EUV AND SOFT X-RAY WAVELENGTHS; 2.1 Maxwell's Equations and the Wave Equation; 2.2 Calculating Scattered Fields; 2.3 Radiated Power and Poynting's Theorem. 2.4 Scattering Cross Sections2.5 Scattering by a Free Electron; 2.6 Scattering by Bound Electrons; 2.7 Scattering by a Multi-electron Atom; References; Homework Problems; CHAPTER 3. WAVE PROPAGATION AND REFRACTIVE INDEX AT EUV AND SOFT X-RAY WAVELENGTHS; 3.1 The Wave Equation and Refractive Index; 3.2 Phase Variation and Absorption of Propagating Waves; 3.3 Reflection and Refraction at an Interface; 3.4 Total External Reflection of Soft X-Rays and EUV Radiation; 3.5 Reflection Coefficients at an Interface; 3.5.1 E0 Perpendicular to the Plane of Incidence. 3.5.2 E0 Parallel to the Plane of Incidence3.6 Brewster's Angle; 3.7 Field Penetration into a Lossy Medium Near the Critical Angle; 3.8 Determination of d and ß: The Kramers-Kronig Relations; 3.9 Applications to Glancing Incidence Optics; 3.10 Enhanced Reflectivity from Periodic Structures; References; Homework Problems; CHAPTER 4. MULTILAYER INTERFERENCE COATINGS; 4.1 Introduction; 4.2 Constructive Interference of Scattered Radiation; 4.3 Computational Model for Calculating Reflection from a Multilayer Mirror; 4.4 Multilayer Fabrication; 4.5 Applications of Multilayer Coated Optics. 4.5.1 Soft X-Ray and Extreme Ultraviolet Photoemission Microscopy for Surface Science4.5.2 Extreme Ultraviolet and Soft X-Ray Astronomy; 4.5.3 Extreme Ultraviolet Lithography; 4.5.4 Plasma Diagnostics; 4.5.5 Polarization Studies of Magnetic Materials; 4.5.6 The X-Ray Microprobe; References; Homework Problems; CHAPTER 5. SYNCHROTRON RADIATION; 5.1 Introduction; 5.2 Characteristics of Bending Magnet Radiation; 5.3 Characteristics of Undulator Radiation; 5.3.1 Undulator Radiation Pattern; 5.3.2 The Central Radiation Cone. 5.4 Undulator Radiation: Calculations of Radiated Power, Brightness, and Harmonics5.4.1 The Undulator Equation; 5.4.2 Comments on Undulator Harmonics; 5.4.3 Power Radiated in the Central Radiation Cone; 5.4.4 Power as a Function of Angle and Total Radiated Power; 5.4.5 Spectral Bandwidth of Undulator Radiation; 5.4.6 Spectral Brightness of Undulator Radiation; 5.4.7 Time Structure; 5.4.8 Polarization Properties of Undulator Radiation; 5.5 The Scale of Harmonic Motion; 5.6 The Transition from Undulator to Wiggler Radiation; 5.7 Wiggler Power and Flux; 5.8 Femtosecond Pulse Generation